Without our partners the organisation of this symposium would be not possible. We are grateful for their support and would like to thank them for their contributions.

 

Our main partner: Physics of Fluids

BIOS Lab on a chip

Biomedical Photonics and Imaging

Energy Materials and Systems

Inorganic Materials Science

de Nederlandse Natuurkunde Vereniging

XUV Optics


Physics of Fluids

The Physics of Fluids group is studying various flow phenomena. The present research interests cover fluid dynamics in a broad sense. Both fundamental and more applied science is done in the group and both experimental, theoretical, and numerical methods are used. The group receives external research funds from NWO, ERC, EU, and various companies. The group is part of the Max Planck Center for Complex Fluid Mechanics and participates in the research program of the MESA+ Institute of Nanotechnology and the Technical Medical (TechMed) Centre.


Inorganic Materials Science

The IMS group works at the international forefront of materials science research on complex metal oxides and hybrids, and provides an environment where young researchers and students are stimulated to excel in this field. The research is focussed on the following activities:

  • Nanoelectronic MaterialsThe general objective of the chair NanoElectronic Materials (NEM) is the research in new inorganic materials for applications in nanotechnology, and to improve the existing ones. The research is based on current trends in nanomaterials science and developments within MESA+: controlled growth of materials, control of their structure, and understanding of the structure-property relations.
  • Physics Of Complex Inorganic Nano-Materials
    The research in the IMS workgroup headed by dr. Gertjan Koster focuses on three areas: manipulated oxide thin film growth and modeling, oxide thin film meso materials and in situ spectroscopy. The research is centered on the COMAT system; a UHV pulsed laser deposition (PLD) system with in situ spectroscopies and imaging techniques (XPS, UPS, XPD, STM, AFM, PFM).
  • Inorganic & Hybrid Nanomaterials Chemistry
    Activities are focused on the development functional inorganic and hybrid nanomaterials and nanostructures from colloidal and chemical solutions. The main emphasis within the research is on oxide and hybrid thin films for energy and electronic applications, soft lithographic micro- and nanopatterning of functional oxides, and the synthesis and applications of low-dimensional nanostructures like nanowires and nanosheets.
  • Nanomaterials for energy
    The research is focused on the study of novel nanostructured thin films with special structural and advanced functional properties at the incorporated interfaces. The aim is to develop new materials towards improved energy applications, such as solid-state batteries and thermoelectric energy generators.
  • Functional Optoelectronic Materials for Energy
    The research focusses on the fabrication, design and understanding of novel materials that will match specific application requirements in solar cells and other advanced optoelectronic devices. We use a combination of fundamental material studies, thin film deposition techniques, combinatorial growth and characterization techniques to build a deep understanding of the relations between structural, compositional, optical and electrical properties to optimize and functionalize new optoelectronic materials.

For more information, please visit the following website: http://www.utwente.nl/tnw/ims.


XUV optics

The research of XUV focuses on the following fields:

Manipulating light in the XUV range
XUV light—light with a wavelength in the range from tenths to tens of nanometers—offers new insight in the physics and industrial opportunities. XUV light can trigger atomic and material processes that are otherwise unobserved, providing a new view on light-matter interactions. For industry, XUV light offers the ability to image at the nanometer scale, and to perform materials analysis with high sensitivity. These applications all require high precision optics to manipulate the light: optics that reflect, focus, and filter XUV light.

Industrial Focus Group XUV Optics
The development of such optics is the goal of the ‘Industrial Focus Group XUV Optics’. The group is among the top groups in nanotechnology and excels at gearing fundamental research to the specific questions and needs of science and industry. Industrial partners like ASML, Carl Zeiss, and Malvern Panalytical join the Focus Group from the first onset of technological developments to gain advantages in product development.

Applications
The work of the group has applications in the fields of photolithography, materials analysis, and spectroscopy. Examples are found in X-ray space telescopes, Malvern Panalytical’s spectrometers, and in ASML’s wafer scanners. The group’s research has been key to the development of high-resolution photolithography, enabling a new generation of computer chips.

Physics programme
At the heart of XUV optical elements is the multilayer mirror, consisting of many alternating layers of two or more materials. These layers are typically only a few nm thick. The performance of the optics depends on the design, the precision, and the durability of this multilayer. The research programme of the Focus Group covers fundamental studies on the design and growth of multilayered structures, the optimisation of their spectral response, the control of XUV-induced surface processes, and the development of coating and nanostructuring techniques.

Facilities
The experimental facilities for the optics and materials research are state-of-the-art. They consist of several ultra-high vacuum cluster tools including multi-method deposition chambers, facilities for x-ray photoelectron spectroscopy, high-sensitivity low-energy ion scattering, and scanning tunnelling microscopy. For the investigation of EUV-induced processes, the group has an experimental set-up for EUV exposure, which is attached to an EUV light source at ASML.

Contact
Prof.dr. Fred Bijkerk: f.bijkerk@utwente.nl, +31534892130, or Dr. Eric Louis (+31534894378).
www.utwente.nl/xuv/